Semiconductor Metrology/Inspection Equipment Market

By Technology;

Inspection Equipment [Wafer Inspection, Defect Inspection, Mask & Photomask Inspection, Bump & Package Inspection and Others] and Metrology Equipment [Critical Dimension (CD) Metrology, Thin Film Metrology, Overlay Metrology, Wafer Shape & Surface Metrology and Others]

By Dimension;

2D Metrology & Inspection, 3D Metrology & Inspection and Hybrid 2D & 3D Systems

By Process Node;

Less Than or Equal 7 nm, 8–14 nm, 15–28 nm and Greater Than 28 nm

By Fab Type;

Foundry, Memory, Logic and Integrated Device Manufacturer (IDM)

By Geography;

North America, Europe, Asia Pacific, Middle East & Africa and Latin America - Report Timeline (2021 - 2031)
Report ID: Rn249931199 Published Date: September, 2025 Updated Date: November, 2025

Semiconductor Metrology/Inspection Equipment Market Overview

Semiconductor Metrology/Inspection Equipment Market (USD Million)

Semiconductor Metrology/Inspection Equipment Market was valued at USD 5,454.49 million in the year 2024. The size of this market is expected to increase to USD 6,572.75 million by the year 2031, while growing at a Compounded Annual Growth Rate (CAGR) of 2.7%.


Semiconductor Metrology/Inspection Equipment Market

*Market size in USD million

CAGR 2.7 %


Study Period2025 - 2031
Base Year2024
CAGR (%)2.7 %
Market Size (2024)USD 5,454.49 Million
Market Size (2031)USD 6,572.75 Million
Market ConcentrationHigh
Report Pages384
5,454.49
2024
6,572.75
2031

Major Players

  • KLA Corporation
  • Applied Materials Inc
  • Onto Innovation Inc
  • Thermo Fisher Scientific Inc
  • Hitachi Hi-Technologies Corporation
  • Nova Measuring Instruments
  • ASML Holding NV
  • Lasertec Corporation
  • JEOL Ltd
  • Nikon Metrology NV
  • Camtek Limited

Market Concentration

Consolidated - Market dominated by 1 - 5 major players

Semiconductor Metrology/Inspection Equipment Market

Fragmented - Highly competitive market without dominant players


The Semiconductor Metrology/Inspection Equipment Market is growing rapidly as the demand for precision and quality control in semiconductor manufacturing intensifies. Approximately 75% of semiconductor manufacturers use metrology and inspection equipment to ensure the quality, performance, and reliability of their products. As semiconductor devices become increasingly smaller and more complex, the need for highly accurate testing and measurement tools has increased, fueling the market's growth.

Rising Demand for High-Quality Semiconductor Components
The demand for semiconductor metrology and inspection equipment is largely driven by the increasing need for high-quality components in consumer electronics, automotive, and industrial applications. Around 65% of semiconductor production relies on stringent inspection processes to ensure that each chip meets the required standards. This growing demand for high-performance devices is prompting semiconductor manufacturers to adopt advanced metrology equipment to maintain quality and functionality.

Technological Advancements in Metrology and Inspection Tools
Innovations in metrology and inspection technologies are significantly boosting the market's growth. Approximately 60% of new metrology and inspection systems incorporate advanced features such as 3D imaging, atomic-level measurements, and non-destructive testing. These advancements allow for more accurate detection of defects, leading to improved yield rates and reduced wastage during the semiconductor manufacturing process.

Integration of Metrology Tools in Semiconductor Production Lines
The integration of advanced metrology and inspection tools into semiconductor production lines is becoming more prevalent. Around 70% of semiconductor manufacturers now incorporate automated metrology systems into their production processes to enhance efficiency and reduce human error. This integration is essential for maintaining high throughput and ensuring that chips meet the rigorous quality standards required for modern electronics.

  1. Introduction
    1. Research Objectives and Assumptions
    2. Research Methodology
    3. Abbreviations
  2. Market Definition & Study Scope
  3. Executive Summary
    1. Market Snapshot, By Technology
    2. Market Snapshot, By Dimension
    3. Market Snapshot, By Process Node
    4. Market Snapshot, By Fab Type
    5. Market Snapshot, By Region
  4. Semiconductor Metrology/Inspection Equipment Market Dynamics
    1. Drivers, Restraints and Opportunities
      1. Drivers
        1. Increasing Demand for Advanced Semiconductor Devices
        2. Growing Focus on Miniaturization
        3. Rising Adoption of Emerging Technologies
      2. Restraints
        1. High Cost of Equipment
        2. Complexity of Operation
      3. Opportunities
        1. Growing Demand from Asia Pacific
        2. Advancements in Technology
        3. Integration with Artificial Intelligence
    2. PEST Analysis
      1. Political Analysis
      2. Economic Analysis
      3. Social Analysis
      4. Technological Analysis
    3. Porter's Analysis
      1. Bargaining Power of Suppliers
      2. Bargaining Power of Buyers
      3. Threat of Substitutes
      4. Threat of New Entrants
      5. Competitive Rivalry

  5. Market Segmentation
    1. Semiconductor Metrology/Inspection Equipment Market, By Technology, 2021 - 2031 (USD Million)
      1. Inspection Equipment
        1. Wafer Inspection
        2. Defect Inspection
        3. Mask & Photomask Inspection
        4. Bump & Package Inspection
        5. Others
      2. Metrology Equipment
        1. Critical Dimension (CD) Metrology
        2. Thin Film Metrology
        3. Overlay Metrology
        4. Wafer Shape & Surface Metrology
        5. Others
    2. Semiconductor Metrology/Inspection Equipment Market, By Dimension, 2021 - 2031 (USD Million)
      1. 2D Metrology & Inspection
      2. 3D Metrology & Inspection
      3. Hybrid 2D & 3D Systems
    3. Semiconductor Metrology/Inspection Equipment Market, By Process Node, 2021 - 2031 (USD Million)
      1. Less Than or Equal 7 nm
      2. 8–14 nm
      3. 15–28 nm
      4. Greater Than 28 nm
    4. Semiconductor Metrology/Inspection Equipment Market, By Fab Type, 2021 - 2031 (USD Million)
      1. Foundry
      2. Memory
      3. Logic
      4. Integrated Device Manufacturer (IDM)
    5. Semiconductor Metrology/Inspection Equipment Market, By Geography, 2021 - 2031 (USD Million)
      1. North America
        1. United States
        2. Canada
      2. Europe
        1. Germany
        2. United Kingdom
        3. France
        4. Italy
        5. Spain
        6. Nordic
        7. Benelux
      3. Rest of Europe
        1. Asia Pacific
        2. Japan
        3. China
        4. India
        5. Australia & New Zealand
        6. South Korea
        7. ASEAN (Association of South East Asian Countries)
        8. Rest of Asia Pacific
      4. Middle East & Africa
        1. GCC
        2. Israel
        3. South Africa
        4. Rest of Middle East & Africa
      5. Latin America
        1. Brazil
        2. Mexico
        3. Argentina
        4. Rest of Latin America
  6. Competitive Landscape
    1. Company Profiles
      1. KLA Corporation
      2. Applied Materials, Inc.
      3. ASML Holding N.V.
      4. Onto Innovation Inc.
      5. Hitachi High-Tech / Hitachi High-Technologies
      6. NOVA Measuring Instruments Ltd.
      7. Thermo Fisher Scientific Inc.
      8. Lasertec Corporation
      9. JEOL Ltd.
      10. Nikon Metrology NV
      11. Camtek Limited
      12. SCREEN Semiconductor Solutions
      13. Unity Semiconductor (SAS)
      14. Zeiss (Carl Zeiss AG)
      15. Nanometrics Incorporated
  7. Analyst Views
  8. Future Outlook of the Market