Lithography Equipment Market

By Technology;

Mask Aligner, Projection, Laser Direct Imaging and Laser Ablation

By Packaging Platform;

3D IC, 2.5D Interposer, FO WLP Wafer, WL CSP, Flip Chip Bumping, 3D WLP, Embedded Die, FO WKP Panel and Glass Panel Imposer

By Equipment Type;

Steppers and Scanners

By Application;

Advanced Packaging, MEMS Devices and LED Devices

By Geography;

North America, Europe, Asia Pacific, Middle East & Africa and Latin America - Report Timeline (2021 - 2031)
Report ID: Rn948126043 Published Date: August, 2025 Updated Date: September, 2025

Lithography Equipment Market Overview

Lithography Equipment Market (USD Million)

In the year 2024, the Global Lithography Equipment Market was valued at USD 12,291.97 million. The size of this market is expected to increase to USD 24,570.00 million by the year 2031, while growing at a Compounded Annual Growth Rate (CAGR) of 10.4%.


Lithography Equipment Market

*Market size in USD million

CAGR 10.4 %


Study Period2025 - 2031
Base Year2024
CAGR (%)10.4 %
Market Size (2024)USD 12,291.97 Million
Market Size (2031)USD 24,570.00 Million
Market ConcentrationLow
Report Pages352
12,291.97
2024
24,570.00
2031

Major Players

  • Ultratech Inc.
  • SUSS Microtech Lithography GmbH
  • Canon USA Inc.
  • Nikon Corporation
  • Shanghai Micro Electronics Equipment Co., Ltd.
  • Rudolph Technologies Inc.
  • EV Group Inc.
  • ASML System BV
  • ORC
  • USHIO
  • Orbotech

Market Concentration

Consolidated - Market dominated by 1 - 5 major players

Lithography Equipment Market

Fragmented - Highly competitive market without dominant players


The Lithography Equipment Market plays a critical role in semiconductor manufacturing by enabling the design of highly advanced and compact integrated circuits. Its growth is strongly supported by the rising demand for high-performance chips and next-generation electronics, with over 60% of semiconductor fabrication relying on lithography technologies.

Technological Advancements
One of the most transformative developments is the adoption of extreme ultraviolet (EUV) lithography, which now makes up around 35% of new system installations. EUV systems support smaller and more powerful chip nodes, catering to industries such as artificial intelligence, advanced computing, and 5G networks. Alongside this, improvements in resolution enhancement and overlay precision continue to shape market momentum.

Rising Demand from Electronics
The market is also experiencing increased demand from consumer and industrial electronics. Over 40% of chipmakers are investing heavily in lithography solutions to meet requirements for smartphones, automotive systems, and IoT devices. This reflects the central importance of lithography in ensuring smaller, faster, and more efficient processors.

Challenges and Cost Factors
However, the industry encounters barriers such as high equipment cost and complex operational needs. EUV systems require more than 25% higher investment compared to traditional DUV tools, and they demand specialized infrastructure and skilled expertise. These challenges influence adoption decisions, particularly for smaller fabrication facilities.

  1. Introduction
    1. Research Objectives and Assumptions
    2. Research Methodology
    3. Abbreviations
  2. Market Definition & Study Scope
  3. Executive Summary
    1. Market Snapshot, By Technology
    2. Market Snapshot, By Packaging Platform
    3. Market Snapshot, By Equipment Type
    4. Market Snapshot, By Application
    5. Market Snapshot, By Region
  4. Lithography Equipment Market Dynamics
    1. Drivers, Restraints and Opportunities
      1. Drivers
        1. Technological Advancements
        2. Growing Semiconductor Demand
        3. Miniaturization Trends
        4. High-Performance Computing
      2. Restraints
        1. High Equipment Costs
        2. Complex Technology
        3. Supply Chain Disruptions
        4. Technological Challenges
      3. Opportunities
        1. Emerging Markets
        2. Next-Generation Devices
        3. Advanced Packaging Innovations
        4. Sustainability Initiatives
    2. PEST Analysis
      1. Political Analysis
      2. Economic Analysis
      3. Social Analysis
      4. Technological Analysis
    3. Porter's Analysis
      1. Bargaining Power of Suppliers
      2. Bargaining Power of Buyers
      3. Threat of Substitutes
      4. Threat of New Entrants
      5. Competitive Rivalry
  5. Market Segmentation
    1. Lithography Equipment Market, By Technology, 2021 - 2031 (USD Million)
      1. Mask Aligner
      2. Projection
      3. Laser Direct Imaging
      4. Laser Ablation
    2. Lithography Equipment Market, By Packaging Platform, 2021 - 2031 (USD Million)
      1. 3D IC
      2. 2.5D Interposer
      3. FO WLP Wafer
      4. WL CSP
      5. Flip Chip Bumping
      6. 3D WLP
      7. Embedded Die
      8. FO WKP Panel
      9. Glass Panel Imposer
    3. Lithography Equipment Market, By Equipment Type, 2021 - 2031 (USD Million)

      1. Steppers

      2. Scanners

    4. Lithography Equipment Market, By Application, 2021 - 2031 (USD Million)
      1. Advanced Packaging
      2. MEMS Devices
      3. LED Devices
    5. Lithography Equipment Market, By Geography, 2021 - 2031 (USD Million)
      1. North America
        1. United States
        2. Canada
      2. Europe
        1. Germany
        2. United Kingdom
        3. France
        4. Italy
        5. Spain
        6. Nordic
        7. Benelux
        8. Rest of Europe
      3. Asia Pacific
        1. Japan
        2. China
        3. India
        4. Australia & New Zealand
        5. South Korea
        6. ASEAN (Association of South East Asian Countries)
        7. Rest of Asia Pacific
      4. Middle East & Africa
        1. GCC
        2. Israel
        3. South Africa
        4. Rest of Middle East & Africa
      5. Latin America
        1. Brazil
        2. Mexico
        3. Argentina
        4. Rest of Latin America
  6. Competitive Landscape
    1. Company Profiles
      1. Ultratech Inc.
      2. SUSS Microtech Lithography GmbH
      3. Canon USA Inc.
      4. Nikon Corporation
      5. Shanghai Micro Electronics Equipment Co., Ltd.
      6. Rudolph Technologies Inc.
      7. EV Group Inc.
      8. ASML System BV
      9. ORC
      10. USHIO
      11. Orbotech
      12. Screen
  7. Analyst Views
  8. Future Outlook of the Market