Chemical Mechanical Planarization (CMP) Equipment Market

By Product Type;

CMP Equipment and CMP Consumables

By Technology;

Conventional CMP and Advanced CMP

By Wafer Size;

300mm, 200mm, and 150mm

By End-User;

Pureplay Foundries and IDMs

By Geography;

North America, Europe, Asia Pacific, Middle East & Africa, and Latin America - Report Timeline (2021 - 2031)
Report ID: Rn126180050 Published Date: August, 2025

CMP Equipment Market Overview

CMP Equipment Market (USD Million)

CMP Equipment Market was valued at USD 2,510.61 million in the year 2024. The size of this market is expected to increase to USD 3,676.43 million by the year 2031, while growing at a Compounded Annual Growth Rate (CAGR) of 5.6%.


Chemical Mechanical Planarization (CMP) Equipment Market

*Market size in USD million

CAGR 5.6 %


Study Period2025 - 2031
Base Year2024
CAGR (%)5.6 %
Market Size (2024)USD 2,510.61 Million
Market Size (2031)USD 3,676.43 Million
Market ConcentrationMedium
Report Pages322
2,510.61
2024
3,676.43
2031

Major Players

  • Applied Materials Inc.
  • Entegris Inc.
  • Ebara Corporation
  • Lapmaster Wolters Gmbh
  • Dupont De Nemours Inc.
  • Fujimi Incorporated
  • Revasum Inc.
  • Resonac Holdings Corporation (Showa Denko Materials)
  • Okamoto Corporation
  • Fujifilm Corporation (Fujifilm Holdings Corporation)
  • Tokyo Seimitsu Co. Ltd (Accretech Create Corp.)

Market Concentration

Consolidated - Market dominated by 1 - 5 major players

Chemical Mechanical Planarization (CMP) Equipment Market

Fragmented - Highly competitive market without dominant players


The CMP Equipment Market is being reshaped by intelligent polishing solutions featuring pressure profiling, quality analytics, and automated problem detection. More than 50% of recent machines now offer precision slurry delivery and in-line quality checks. These technological advancements present strong opportunities to boost wafer yield, reduce downtime, and enable advanced device geometries.

Collaborative Developments Empower Fabrication Efficiency
Strong partnerships with slurry providers, CMP pads suppliers, and fab automation firms are creating more robust process platforms. Nearly 45% of emerging systems are co-developed among these groups, enhancing consistency, reducing variation, and shortening recipe development. These strategies lead to improved manufacturability and time-to-production benefits.

Growth Opportunities and Anticipated Future Trend
Rising focus on 3D integration, UDLM, and sub-7nm process nodes is generating wide opportunities. About 55% of equipment now includes adaptive polishing cycles, surface uniformity optimization, and real-time end-point sensing. The future outlook suggests continued momentum as fabs adopt increasingly intelligent and efficient CMP tools.

Innovation-Focused Strategies Driving Market Expansion
Equipment providers are prioritizing strategies such as remote monitoring, slurry recycling protocols, and energy-efficient drives. Over 60% of current systems offer telemetry integration, fault detection, and adaptive control loops. These innovations are powering consistent growth and contributing to expansion into advanced semiconductor applications like power devices and MEMS.

  1. Introduction
    1. Research Objectives and Assumptions
    2. Research Methodology
    3. Abbreviations
  2. Market Definition & Study Scope
  3. Executive Summary
    1. Market Snapshot, By Product Type
    2. Market Snapshot, By Technology
    3. Market Snapshot, By Wafer Size
    4. Market Snapshot, By End-User
    5. Market Snapshot, By Region
  4. CMP Equipment Market Dynamics
    1. Drivers, Restraints and Opportunities
      1. Drivers
        1. Technological Advancements in CMP Processes
        2. Increasing Semiconductor Wafer Sizes
        3. Growing Demand for Consumer Electronics
      2. Restraints
        1. Environmental and Safety Concerns
        2. Cyclic Nature of Semiconductor Industry
        3. Challenges in CMP for New Materials
      3. Opportunities
        1. Rapid Technological Innovations
        2. Increasing Focus on Green CMP Solutions
        3. Expansion of Semiconductor Foundries
    2. PEST Analysis
      1. Political Analysis
      2. Economic Analysis
      3. Social Analysis
      4. Technological Analysis
    3. Porter's Analysis
      1. Bargaining Power of Suppliers
      2. Bargaining Power of Buyers
      3. Threat of Substitutes
      4. Threat of New Entrants
      5. Competitive Rivalry
  5. Market Segmentation
    1. CMP Equipment Market, By Product Type, 2021- 2031(USD Million)

      1. CMP Equipment

      2. CMP Consumables

    2. CMP Equipment Market, By Technology, 2021- 2031(USD Million)

      1. Conventional CMP

      2. Advanced CMP

    3. CMP Equipment Market, By Wafer Size, 2021- 2031(USD Million)
      1. 300mm
      2. 200mm
      3. 150mm
    4. CMP Equipment Market, By End-User, 2021- 2031(USD Million)
      1. Pureplay Foundries
      2. IDMs
    5. CMP Equipment Market, By Geography, 2021- 2031(USD Million)
      1. North America
        1. United States
        2. Canada
      2. Europe
        1. Germany
        2. United Kingdom
        3. France
        4. Italy
        5. Spain
        6. Nordic
        7. Benelux
        8. Rest of Europe
      3. Asia Pacific
        1. Japan
        2. China
        3. India
        4. Australia & New Zealand
        5. South Korea
        6. ASEAN (Association of South East Asian Countries)
        7. Rest of Asia Pacific
      4. Middle East & Africa
        1. GCC
        2. Israel
        3. South Africa
        4. Rest of Middle East & Africa
      5. Latin America
        1. Brazil
        2. Mexico
        3. Argentina
        4. Rest of Latin America
  6. Competitive Landscape
    1. Company Profiles
      1. Applied Materials Inc.

      2. Entegris Inc.

      3. Ebara Corporation

      4. Lapmaster Wolters Gmbh

      5. Dupont De Nemours Inc.

      6. Fujimi Incorporated

      7. Revasum Inc.

      8. Resonac Holdings Corporation (Showa Denko Materials)

      9. Okamoto Corporation

      10. Fujifilm Corporation (Fujifilm Holdings Corporation)

      11. Tokyo Seimitsu Co. Ltd (Accretech Create Corp.)

  7. Analyst Views
  8. Future Outlook of the Market