Chemical Mechanical Planarization Market

By Product Type;

CMP Equipment [Single-Wafer CMP Systems, Post-CMP Cleaning Equipment, Batch CMP Systems and Others] and CMP Consumables [CMP Slurry (Silica-Based Slurry, Aluminum Oxide-Based Slurry, Cerium Oxide-Based Slurry, Composite/Engineered Abrasive Slurry and Others), Pads and Others

By Application;

Integrated Circuit, Compound Semiconductor, MEMS & NEMS, Advanced Packaging and Other Applications

By End User;

Foundries, Integrated Device Manufacturers (IDMs), Outsourced Semiconductor Assembly & Test (OSAT) and R&D Institutes/Universities

By Geography;

North America, Europe, Asia Pacific, Middle East & Africa and Latin America - Report Timeline (2021 - 2031)
Report ID: Rn998895987 Published Date: September, 2025 Updated Date: November, 2025

Chemical Mechanical Planarization Market Overview

Chemical Mechanical Planarization Market (USD Million)

Chemical Mechanical Planarization Market was valued at USD 6,451.16 million in the year 2024. The size of this market is expected to increase to USD 10,291.57 million by the year 2031, while growing at a Compounded Annual Growth Rate (CAGR) of 6.9%.


Chemical Mechanical Planarization Market

*Market size in USD million

CAGR 6.9 %


Study Period2025 - 2031
Base Year2024
CAGR (%)6.9 %
Market Size (2024)USD 6,451.16 Million
Market Size (2031)USD 10,291.57 Million
Market ConcentrationMedium
Report Pages368
6,451.16
2024
10,291.57
2031

Major Players

  • Applied Materials Inc
  • Cabot Microelectronics
  • Fujimi Incorporated
  • Hitachi Chemical Co Ltd
  • EBARA CORPORATION
  • KOPAFILM Elektrofolien GmbH
  • Versum Materials
  • DuPont Electronic Solutions
  • BASF SE
  • Sungmoon Electronics Co Ltd
  • LAM RESEARCH CORPORATION
  • Intel Corporation
  • Samsung Electronics Co Ltd
  • Micron Technology Inc
  • Taiwan Semiconductor
  • Okamoto Machine Tool Works Ltd
  • Alpsitec SAS
  • Axus Technology
  • Revasum
  • GLOBALFOUNDRIES

Market Concentration

Consolidated - Market dominated by 1 - 5 major players

Chemical Mechanical Planarization Market

Fragmented - Highly competitive market without dominant players


The Chemical Mechanical Planarization (CMP) Market plays a pivotal role in semiconductor manufacturing by delivering smooth, defect-free wafer surfaces. This process is essential for enhancing chip performance and reliability, with more than 60% of wafers undergoing CMP during production. Growing demand for high-performance, miniaturized semiconductors is driving its adoption across multiple fabrication stages. CMP is now recognized as a critical step in ensuring the efficiency and functionality of modern electronic devices.

Driving Factors Behind Market Growth
The increasing need for advanced integrated circuits and memory solutions is fueling CMP adoption. Innovations in polishing pads and slurries have significantly improved process efficiency, achieving 8-10% growth in usage. The market is further propelled by next-generation CMP techniques that support complex 3D architectures and smaller semiconductor nodes, highlighting the technology’s role in cutting-edge chip production.

Technological Innovations Shaping CMP
Automation and precision control systems have transformed CMP, delivering over 70% improvement in wafer surface uniformity. The integration of eco-friendly slurries and low-abrasive pads is reducing operational costs while minimizing environmental impact. These advancements not only enhance yield but also strengthen the market’s focus on efficient, cost-effective, and sustainable processes.

Future Outlook of the CMP Market
The CMP market outlook remains promising, driven by demand for denser memory chips and smaller transistor sizes. Adoption of automation and innovative process technologies is projected to enhance efficiency by over 50% in the coming years. As semiconductor fabrication advances, CMP will continue to be a cornerstone technology, ensuring wafer planarity and supporting the development of next-generation electronic devices.

  1. Introduction
    1. Research Objectives and Assumptions
    2. Research Methodology
    3. Abbreviations
  2. Market Definition & Study Scope
  3. Executive Summary
    1. Market Snapshot, By Product Type
    2. Market Snapshot, By Application
    3. Market Snapshot, By End User
    4. Market Snapshot, By Region
  4. Chemical Mechanical Planarization Market Dynamics
    1. Drivers, Restraints and Opportunities
      1. Drivers
        1. Semiconductor Growth
        2. Advanced Manufacturing Technologies
        3. Miniaturization Trends
        4. High-Performance Electronics
      2. Restraints
        1. High Equipment Costs
        2. Complex Process Requirements
        3. Material Compatibility Issues
        4. Regulatory Compliance
      3. Opportunities
        1. Emerging Markets Expansion
        2. Advanced Material Development
        3. Next-Generation Electronics
        4. Customization and Innovation
    2. PEST Analysis
      1. Political Analysis
      2. Economic Analysis
      3. Social Analysis
      4. Technological Analysis
    3. Porter's Analysis
      1. Bargaining Power of Suppliers
      2. Bargaining Power of Buyers
      3. Threat of Substitutes
      4. Threat of New Entrants
      5. Competitive Rivalry
  5. Market Segmentation
    1. Chemical Mechanical Planarization Market, By Product Type, 2021 - 2031 (USD Million)
      1. CMP Equipment
        1. Single-Wafer CMP Systems
        2. Post-CMP Cleaning Equipment
        3. Batch CMP Systems
        4. Others
      2. CMP Consumables
        1. CMP Slurry
          1. Silica-Based Slurry
          2. Aluminum Oxide-Based Slurry
          3. Cerium Oxide-Based Slurry
          4. Composite/Engineered Abrasive Slurry
          5. Others
        2. Pads
        3. Others
    2. Chemical Mechanical Planarization Market, By Application, 2021 - 2031 (USD Million)
      1. Integrated Circuit
      2. Compound Semiconductor
      3. MEMS & NEMS
      4. Advanced Packaging
      5. Other Applications
    3. Chemical Mechanical Planarization Market, By End User, 2021 - 2031 (USD Million)
      1. Foundries
      2. Integrated Device Manufacturers (IDMs)
      3. Outsourced Semiconductor Assembly & Test (OSAT)
      4. R&D Institutes/Universities
    4. Chemical Mechanical Planarization Market, By Geography, 2021 - 2031 (USD Million)
      1. North America
        1. United States
        2. Canada
      2. Europe
        1. Germany
        2. United Kingdom
        3. France
        4. Italy
        5. Spain
        6. Nordic
        7. Benelux
        8. Rest of Europe
      3. Asia Pacific
        1. Japan
        2. China
        3. India
        4. Australia & New Zealand
        5. South Korea
        6. ASEAN (Association of South East Asian Countries)
        7. Rest of Asia Pacific
      4. Middle East & Africa
        1. GCC
        2. Israel
        3. South Africa
        4. Rest of Middle East & Africa
      5. Latin America
        1. Brazil
        2. Mexico
        3. Argentina
        4. Rest of Latin America
  6. Competitive Landscape
    1. Company Profiles
      1. Applied Materials, Inc.
      2. Ebara Corporation
      3. Lapmaster Wolters (Precision Surfacing Solutions)
      4. Cabot Microelectronics Corporation (CMC Materials)
      5. Fujimi Incorporated
      6. DuPont de Nemours, Inc.
      7. LAM Research Corporation
      8. Hitachi High-Tech Corporation
      9. BASF SE
      10. Okamoto Machine Tool Works, Ltd.
      11. Entegris Inc.
      12. KLA Corporation
      13. Strasbaugh Inc.
      14. Air Products and Chemicals, Inc.
      15. Saint-Gobain Surface Conditioning
  7. Analyst Views
  8. Future Outlook of the Market